Connecting the German ALD Community with Martin Knaut ALD Stories Ep. 31
ALD stories podcast
Episode 31 features German ALD professor, Dr. Martin Knaut. Martin is the chair for the Institute of Semiconductor and Microsystems Technology at TU Dresden and the atomic layer processing group leader. He is also a founding member of the Atomic Layer Process Innovation Network, or ALPIN, organizer of the annual ALD for Industry event, and runs a small in situ tool development company, called ALS Metrology. With a long career working with ALD in Dresden, at the likes of Infineon and Qimonda, Martin has witnessed the ebbs and flows of the semiconductor industry in the state of Saxony. Martin...
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SnS ALD and Ultrathin Solar Cells with Carl Hägglund – ALD Stories Ep. 30
ALD stories podcast
In this episode, Tyler is joined by Professor Carl Hägglund from Uppsala University. They discuss Carl’s motivations for pursuing ultrathin solar cells, how he learned ALD at Stanford in Stacey Bent’s lab, and an unlikely research connection through his child’s school. They also talk about why ALD is useful for plasmonic solar cells, optimization of SnS ALD and his planned path towards a fully realized ultrathin photovoltaic. 00:00 Introduction 01:45 Motivation for fabricating plasmonic solar cells 09:58 Learning ALD at Stanford ...
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Introducing ALD to the Semiconductor Industry with Suvi Haukka – ALD Stories Ep. 29
ALD stories podcast
Dr. Suvi Haukka, former executive technologist at ASM, ASM Fellow and ALD Innovator Awardee, joins Tyler for Episode 29. Suvi began her ALD career at Microchemistry in Finland working on atomic layer epitaxy on catalysts for under the direction of ALD technology inventor, Tuomo Suntola. She continued with Microchemistry as head of the thin film development group before spending most of her time teaching the world’s biggest semiconductor companies, like Intel and Samsung, about ALD. Suvi is one of the integral people in introducing ALD to the semiconductor industry in the 2000s. ...
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Breaking Efficiency Records using ALD with Hele Savin – ALD Stories Ep. 28
ALD stories podcast
In Episode 28 of ALD Stories, Tyler is joined by Aalto University’s Hele Savin. Hele is a professor in the department of Electronics and Nanoengineering where she uses ALD to engineer photovoltaics and semiconductor devices. In 2017, Hele was awarded the women’s innovation prize from the Finnish parliament after fabricating a black silicon solar cell with a record-breaking 22.1% efficiency and currently uses ALD to create induced junction photodiodes with over 100% external quantum efficiency. Hele and Tyler discuss how she was first exposed to ALD by Beneq,...
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The Secret to 100 ALD Patents with Rob Clark – ALD Stories Ep. 27
ALD stories podcast
For Ep. 27, Dr. Rob Clark from Tokyo Electron joins to discuss his rise from an equipment know-nothing to ALD process engineer extraordinaire. Rob, the self-proclaimed Manipulator of Matter, is a Senior MTS and Technology Director at TEL where he leads process and integration of thin film deposition methods for next-generation semiconductor devices. Recorded live at ALD ALE 2023 in Washington, Rob and Tyler discuss how he first learned ALD on CVD equipment, the early days of high-k ALD process development, and his work in making some of the first hafnium precursors...
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Balancing Fundamental and Applied ALD with Stacey Bent – ALD Stories Ep. 26
ALD stories podcast
In Episode 26, Professor Stacey Bent from Stanford University joins to discuss all aspects of her career, including early area selective deposition work, how her different academic appointments in chemistry and engineering have influenced the direction of her work, and how ALD can be used in energy applications. Stacey and Tyler also chat about how Stacey finds the best paths for her students, how being a professor and Vice Provost feedback to each other, and new programs she has initiated in her Vice Provost position. In this episode: 00:00 Introduction 03:45 Area Selective Work 15:40...
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The Evolution of the ALD Reactor – ALD Stories Ep. 25
ALD stories podcast
In its short 50 years of existence, the history of ALD has been of great interest, being heavily researched and documented in the last decade. One can follow the story from many lenses: one in particular is to view the technology’s development is through an equipment perspective. Each milestone in process technology was accompanied and enabled by new ALD tools. Without innovative equipment design, we would not have the vast ALD ecosystem we do today. Via patents and literature, this ALDeep Dive will journey the evolution of the ALD reactor. It starts from Tuomo ...
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How to Receive a Gordon E. Moore Medal with Fred Roozeboom – ALD Stories Ep. 24
ALD stories podcast
Dr. Fred Roozeboom joins ALD Stories for Ep. 24. Fred spent most of his career in the semiconductor industry at Philips and NXP working on rapid thermal processing and passive integration. He pivoted to ALD at the TNO Holste Centre and now finds himself at his alma mater, University of Twente. Fred was recently awarded the Gordon E. Moore Medal for Outstanding Achievement in Solid State Science and Technology from the ElectroChemical Society. Fred and Tyler talk about the semiconductor industry in the 80’s, his original RTP work at Phillips, and the importance of passive...
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ALD at the Nexus of Industry & Academia with Harm Knoops – ALD Stories Ep. 23
ALD stories podcast
In Episode 23 of ALD Stories, Dr. Harm Knoops joins Tyler to discuss his dual role at Eindhoven University and Oxford Instruments Plasma Technologies. As an Atomic Scale Specialist, Harm routinely advises on processes in ALD, ALE and 2D materials while informing their work with supplemental research at Eindhoven. Harm and Tyler talk about alternatives careers to the traditional industry and academia binary, how scientists can leverage their technical knowledge, and how working in a cross-institute position makes for efficient science. We also touch on Harm’s work with plasmas,...
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Chemistry of Atomic Layer Deposition with Sean Barry - ALD Stories Ep. 22
ALD stories podcast
Professor Sean Barry from Carleton University joins Tyler on Episode 22 of ALD Stories. Sean recalls his time working at the University of Helsinki and a mishap or two in Mikko Ritala’s lab, how the Finnish ethos inspires him, and why he considers Helsinki his second city. Sean also talks about how knowledge of fundamental chemistry is important for understanding atomic layer deposition, why he decided to write a book on the topic, and how chemistry informed the evolution of gold ALD. In this episode: 00:00 Intro 01:22...
info_outlineOn this episode of the ALD Stories podcast, We speak to Dr. Katja Väyrynen, Process Development Engineer at Beneq. What is the latest ALD research on improving the performance of microchips? Will cobalt become a popular material in semiconductor manufacturing? Hear her academic journey below.